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Microwave plasma CVD high temperature furnace microwave heating system

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Microwave plasma CVD high temperature furnace microwave heating system

China Microwave plasma CVD high temperature furnace microwave heating system supplier
Microwave plasma CVD high temperature furnace microwave heating system supplier Microwave plasma CVD high temperature furnace microwave heating system supplier Microwave plasma CVD high temperature furnace microwave heating system supplier Microwave plasma CVD high temperature furnace microwave heating system supplier Microwave plasma CVD high temperature furnace microwave heating system supplier

Large Image :  Microwave plasma CVD high temperature furnace microwave heating system

Product Details:

Place of Origin: China
Brand Name: Yifei
Model Number: MWP

Payment & Shipping Terms:

Minimum Order Quantity: 1 set
Price: 15000-30000USD/SET
Packaging Details: fumigation free package
Delivery Time: 30 days
Payment Terms: T/T
Supply Ability: 1000 set/year
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Detailed Product Description
Type: Plasma Furnace Heating Source: Microwave
Temperature: 1500℃ Power: 2-4kw

Microwave plasma CVD high temperature furnace microwave heating system
 
 
This equipment with excellent performance of high degree of ionization, high electron temperature and electron density, wide applicable pressure range, no internal electrode contamination, the microwave plasma has wide range of application in the field of material surface treatment, preparation of diamond films, chemical vapor deposition, etching and methane reforming hydrogen, long-lasting phosphorescent materials, ceramic sintering, carbon nano tube modified, nano powder synthesis and processing of water pollution.
Vertical reactor design allows a high plasma density, symmetrical microwave generating device produce a more uniform plasma environment.
 
There is no internal electrode in resonator of microwave plasma CVD furnace; it could avoid contamination generated by electrode discharge, furthermore, with wide operation pressure range, high density and large area of plasma and high stability, as there is no contact with vacuum wall, it avoid pollution to the films from vacuum wall.

Material demandany non flammable and explosive material include metal material, ceramic, organic material, mineral, solution etc..
Microwave frequency2.45GHz±50MHz
Heating modesMicrowave heating
Max power3KW(adjustable)
Max working temperature1200℃
Long term working temperatureLess than 1100℃
Temperature measurementMicrowave field special temperature sensor
Temperature control precision±2℃ by microwave field special temperature sensor
Quartz tube sizeOD102mm/ID92mm*L1000mm
Heating container qty0.5-3L, Optionally 2 containers
Quartz tube sizeOD220mm/ID210mm*H360mm
Configuration of vacuum system( for optional)

Simple mechanical pump and stainless flange
10-1Pa quality mechanical vacuum pump and vacuum gauge
10-2Pa quality mechanical vacuum pump, diffusion pump and vacuum gauge
10-3Pa quality mechanical vacuum pump, molecular pump and vacuum gauge

Rising speed (standard)0~1000℃/min programmable and segmented control and set freely
Temperature control systemControlled by PLC, no touch screen
Machine size(L*W*H)1000mm*750mm*1830mm
Microwave leakageLess than or equal to 0.4mW/cm2
Reference spare partshigh temperature gloves 1 suit, Manual instruction 1 copy
 

 
Microwave plasma CVD high temperature furnace microwave heating system

ModelWBMW-QXCJ4
Material demandany non flammable and explosive material include metal material, ceramic, organic material, mineral, solution etc..
Microwave frequency2.45GHz±50MHz
Heating modes1 Microwave heating mode 2 Electric heating mode 3 Combination microwave and electric heating mode
Max power4KW(adjustable)
Temperature measurementMicrowave field special temperature sensor
Temperature control precision±2℃by microwave field special temperature sensor
Heating tube materialQuartz tubeHigh-temperature alloy tubeCorundum tube
Max heating temperature of heating tube1200℃1200℃1600℃
Tube size(OD/ID*length)45mm/35mm*1200mm, max OD 60mm
Heating rateLess than or equal to 200℃/minNo limitLess than or equal to 50℃/min
Length of constant temperature areaStandard length 10mm, 10mm-1000mm for optional
Heating areaHeating several area at the same time
Air circuit flangeStainless flange
Mass flow controlAlicat mass flow controller, Mass flow controller cabinet,
Air circuit qty2 or 3
Flow rate range0-1SLM(standard L/min) Nitrogen calibration
Accuracy±0.2% F.S
Response timeLess than or equal to 1 second
Work pressureInlet pressure 0.05-0.35Mpa(meter pressure), flow spec less than or equal to 10SLM
Connection of system

Quick links flexible tube, high vacuum manual block valve
digital vacuum gauge

SpecHigh vacuum
Vacuum range of systemStandard atmosphere 10-3Pa
Configuration of vacuum system( for optional)

Simple mechanical pump and stainless flange
10-1Pa quality mechanical vacuum pump and vacuum gauge
10-2Pa quality mechanical vacuum pump, diffusion pump and vacuum gauge
10-3Pa quality mechanical vacuum pump, molecular pump and vacuum gauge

Furnace container size(L*W*H)700mm*350mm*´530mm
Heating container(standard)Set according to tube size, length of heating area, and qty of heating area
Rising speed (standard)0~1000℃/min programmable and segmented control and set freely
Temperature control systemControlled by PLC, no touch screen
Machine size(L*W*H)1500mm*750m*1560mm
Microwave leakageLess than or equal to 0.4mW/cm2
Reference spare partshigh temperature gloves 1 suit, Manual instruction 1 copy
 

 

Contact Details
TANGSHAN YIFEI TRADING CO.,LTD

Contact Person: Mrs. Tina

Tel: 86-315-5773529

Fax: 86-315-5773529

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