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| Type: | Plasma Furnace | Heating Source: | Microwave |
|---|---|---|---|
| Temperature: | 1500℃ | Power: | 2-4kw |
Microwave plasma CVD high temperature furnace microwave heating system
This equipment with excellent performance of high degree of ionization, high electron temperature and electron density, wide applicable pressure range, no internal electrode contamination, the microwave plasma has wide range of application in the field of material surface treatment, preparation of diamond films, chemical vapor deposition, etching and methane reforming hydrogen, long-lasting phosphorescent materials, ceramic sintering, carbon nano tube modified, nano powder synthesis and processing of water pollution.
Vertical reactor design allows a high plasma density, symmetrical microwave generating device produce a more uniform plasma environment.
There is no internal electrode in resonator of microwave plasma CVD furnace; it could avoid contamination generated by electrode discharge, furthermore, with wide operation pressure range, high density and large area of plasma and high stability, as there is no contact with vacuum wall, it avoid pollution to the films from vacuum wall.
| Material demand | any non flammable and explosive material include metal material, ceramic, organic material, mineral, solution etc.. |
| Microwave frequency | 2.45GHz±50MHz |
| Heating modes | Microwave heating |
| Max power | 3KW(adjustable) |
| Max working temperature | 1200℃ |
| Long term working temperature | Less than 1100℃ |
| Temperature measurement | Microwave field special temperature sensor |
| Temperature control precision | ±2℃ by microwave field special temperature sensor |
| Quartz tube size | OD102mm/ID92mm*L1000mm |
| Heating container qty | 0.5-3L, Optionally 2 containers |
| Quartz tube size | OD220mm/ID210mm*H360mm |
| Configuration of vacuum system( for optional) | Simple mechanical pump and stainless flange |
| Rising speed (standard) | 0～1000℃/min programmable and segmented control and set freely |
| Temperature control system | Controlled by PLC, no touch screen |
| Machine size(L*W*H) | 1000mm*750mm*1830mm |
| Microwave leakage | Less than or equal to 0.4mW/cm2 |
| Reference spare parts | high temperature gloves 1 suit, Manual instruction 1 copy |
| Model | WBMW-QXCJ4 | ||
| Material demand | any non flammable and explosive material include metal material, ceramic, organic material, mineral, solution etc.. | ||
| Microwave frequency | 2.45GHz±50MHz | ||
| Heating modes | 1 Microwave heating mode 2 Electric heating mode 3 Combination microwave and electric heating mode | ||
| Max power | 4KW(adjustable) | ||
| Temperature measurement | Microwave field special temperature sensor | ||
| Temperature control precision | ±2℃by microwave field special temperature sensor | ||
| Heating tube material | Quartz tube | High-temperature alloy tube | Corundum tube |
| Max heating temperature of heating tube | 1200℃ | 1200℃ | 1600℃ |
| Tube size(OD/ID*length) | 45mm/35mm*1200mm, max OD 60mm | ||
| Heating rate | Less than or equal to 200℃/min | No limit | Less than or equal to 50℃/min |
| Length of constant temperature area | Standard length 10mm, 10mm-1000mm for optional | ||
| Heating area | Heating several area at the same time | ||
| Air circuit flange | Stainless flange | ||
| Mass flow control | Alicat mass flow controller, Mass flow controller cabinet, | ||
| Air circuit qty | 2 or 3 | ||
| Flow rate range | 0-1SLM(standard L/min) Nitrogen calibration | ||
| Accuracy | ±0.2% F.S | ||
| Response time | Less than or equal to 1 second | ||
| Work pressure | Inlet pressure 0.05-0.35Mpa(meter pressure), flow spec less than or equal to 10SLM | ||
| Connection of system | Quick links flexible tube, high vacuum manual block valve | ||
| Spec | High vacuum | ||
| Vacuum range of system | Standard atmosphere 10-3Pa | ||
| Configuration of vacuum system( for optional) | Simple mechanical pump and stainless flange | ||
| Furnace container size(L*W*H) | 700mm*350mm*´530mm | ||
| Heating container(standard) | Set according to tube size, length of heating area, and qty of heating area | ||
| Rising speed (standard) | 0～1000℃/min programmable and segmented control and set freely | ||
| Temperature control system | Controlled by PLC, no touch screen | ||
| Machine size(L*W*H) | 1500mm*750m*1560mm | ||
| Microwave leakage | Less than or equal to 0.4mW/cm2 | ||
| Reference spare parts | high temperature gloves 1 suit, Manual instruction 1 copy | ||
